scia Coat 500
Scia Coat 500 dual ion beam sputtering coating machine is used for high uniformity coating of large-sized substrates in precision optics. The menu controlled deposition process ensures the repeatability of coating quality. Up to 4 types of baffles can be allowed, which can improve uniformity and also deposit gradient films designed for deposition.
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General attributesThe main ion source is used to sputter the target material onto the sample substrate and deposit it into a film; Secondary ion sources are used for sample surface ion beam bombardment cleaning or auxiliary coating.Sedimentable media and metal films, used for optical filters, X-ray reflectors, synchrotron radiation mirrors, etcDepositable gradient film (such as Gobel mirror)Capable of online substrate pretreatment (etching, cleaning, smoothing)By superimposing substrate rotation and linear motion, excellent deposition uniformity can be achievedThere can be up to 6 water-cooled target materials on the drum target rack for online replacementUse quartz crystal oscillator and/or optical thickness monitor (OTM) to menu control multi-layer film depositionBy using a linear axis motion control system, gradient thin film deposition or surface error correction can be achievedOptional substrate heating to 250 ° C to optimize film stress
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Configurable options
-Optional single sample loadlock, suitable for samples with a maximum diameter of 200 mm.
