Scia Microwave Ion Source MW Series
Ion beams, plasmas, and their control are the core technologies of Scia, and the uniqueness of all its equipment lies in this.
The microwave MW ion source uses electron cyclotron resonance ECR to excite the plasma. It not only has a circular aperture, but also a rectangular source with a long strip. The length of the rectangular source can be increased by adding a radio frequency head, up to 2m.
