scia Multi 680
The Scia Multi 680 magnetron sputtering coating system is specifically designed for high-precision optical multilayer film manufacturing. It can deposit ultra-thin multilayer films with over 100 cycles on flat or curved substrates with a diameter of less than 680mm, and can deposit high-precision uniform or gradient films. Paired with an automated sample loading lock mechanism, it can shorten loading time and increase production capacity.
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General attributesMagnetron sputtering technology utilizes plasma ion bombardment to sputter target materials, thereby depositing thin films on the surface of sample substratesUsing synchronous sample revolution and rotation to form uniform or gradient thin films on curved substratesThere are 6 magnetron sources, each with a separate casing for independent gas supply and setting of their own particle sputtering curvesOptional pre-treatment ion sourceSample carrier operating mechanism with loadlock, featuring 2 independent sample workstationsThe sample is loaded face down to reduce particle contamination
