White light micro interferometer is a high-precision non-destructive measurement instrument for surface three-dimensional morphology. It combines optical microscopy imaging with low coherence interferometry measurement and is widely used in the fields of convolution engineering and scientific research. It can measure surfaces ranging from ultra smooth to very rough by switching between monochromatic and white light measurement modes, meeting the measurement requirements for parameters such as flatness, roughness, and step height. By switching between different magnification interference objectives (optional self-developed 2.5X, 5X, 10X, 20X, 50X, 100X), different measurement field ranges can be obtained. Choosing different scanning mechanisms can achieve a maximum height measurement capability of 100mm, meeting the requirements for detailed morphology measurement of microstructures at different scales.
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Technical specifications
